Publications Position:Papers
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Wang KS, Cheng J, et al., A novel measuring method of clamping force for electrostatic chuck in semiconductor devices. Journal of Semiconductors, 2016; 37(4).
Wang KS, Cheng J*, et al., Determination of electrostatic force and its characteristics based on phase difference by amplitude modulation atomic force microscopy. Nanoscale Research Letters, 2016; 11:548.
Lu YJ, Ji LH, and Cheng J*, Simulation of Dual-Electrode Capacitively Coupled Plasma Discharges. Plasma Science & Technology, 2016; 18(12): 1175-1180.
Cao ML, Lu YJ, Cheng J*, Ji LH. Electron heating enhancement due to plasma series resonance in a capacitively coupled RF discharge: Electrical modeling and comparison to experimental measurements. Japanese Journal of Applied Physics 2016; 55.
Lin J, Hou YM, Cheng J, et al., Interactive Construction of Product Digital Model: The Recursive FBS Design Method and System Prototype. 2015 Advanced Design Concepts and Practice (Adcp 2015), 2016: 172-180.
Sun Y, Cheng J, Lu Y, Ji L, Wang C. Investigation on thermal contact resistance of Si-wafer and electrostatic chuck. Chinese Journal of Vacuum Science and Technology 2016; 36(1). (in Chinese)
LU YJ, JI LH, CHENG J*. Simulation of dual-electrode capacitively coupled plasma discharge. Plasma science and technology. 18(12):1175-1180. 2016. 0.659
Li, C., Rusák, Z., Horváth, I., & Ji, L. (2016). Validation of the reasoning of an entry-level cyber-physical stroke rehabilitation system equipped with engagement enhancing capabilities. Engineering Applications of Artificial Intelligence, 56, 185–199.
Li, C., Rusák, Z., Horváth, I., &Ji, L. (2016). Development of engagement evaluation method and learning mechanism in an engagement enhancing rehabilitation system. Engineering Applications of Artificial Intelligence, 51, 182-190.
Li, C., Rusák, Z., Horváth, I., & Ji, L. (2016). Validation of the reasoning of an entry-level cyber-physical stroke rehabilitation system equipped with engagement enhancing capabilities. Engineering Applications of Artificial Intelligence, 56, 185–199.
Li, C., Rusák, Z., Horváth, I., &Ji, L. (2016). Development of engagement evaluation method and learning mechanism in an engagement enhancing rehabilitation system. Engineering Applications of Artificial Intelligence, 51, 182-190.